Systems, methods, and apparatus of a low conductance silicon micro-leak for mass spectrometer inlet

[摘要] Systems, methods and apparatus are provided through which in some embodiments a mass spectrometer micro-leak includes a number of channels fabricated by semiconductor processing tools and that includes a number of inlet holes that provide access to the channels.

[发布日期] 2011-04-12

[学科分类] 电子与电气工程