Interferometer for Measuring Displacement to Within 20 pm

[摘要] An optical heterodyne interferometer that can be used to measure linear displacements with an error <=20 pm has been developed. The remarkable accuracy of this interferometer is achieved through a design that includes (1) a wavefront split that reduces (relative to amplitude splits used in other interferometers) self interference and (2) a common-optical-path configuration that affords common-mode cancellation of the interference effects of thermal-expansion changes in optical-path lengths. The most popular method of displacement- measuring interferometry involves two beams, the polarizations of which are meant to be kept orthogonal upstream of the final interference location, where the difference between the phases of the two beams is measured. Polarization leakages (deviations from the desired perfect orthogonality) contaminate the phase measurement with periodic nonlinear errors. In commercial interferometers, these phase-measurement errors result in displacement errors in the approximate range of 1 to 10 nm. Moreover, because prior interferometers lack compensation for thermal-expansion changes in optical-path lengths, they are subject to additional displacement errors characterized by a temperature sensitivity of about 100 nm/K. Because the present interferometer does not utilize polarization in the separation and combination of the two interfering beams and because of the common-mode cancellation of thermal-expansion effects, the periodic nonlinear errors and the sensitivity to temperature changes are much smaller than in other interferometers

[发布日期] 2003-07-01

[学科分类] 航空航天科学