Apparatus and method of manufacture for depositing a composite anti-reflection layer on a silicon surface

[摘要] An apparatus and associated method are provided. A first silicon layer having at least one of an associated passivation layer and barrier is included. Also included is a composite anti-reflection layer including a stack of layers each with a different thickness and refractive index. Such composite anti-reflection layer is disposed adjacent to the first silicon layer.

[发布日期] 2012-05-08

[学科分类] 复合材料