Large Format Transition Edge Sensor Microcalorimeter Arrays

[摘要] We have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Designs include kilopixel scale arrays of relatively small sensors (approximately 75 micron pitch) atop a thick metal heat sinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.

[发布日期] 2012-10-08

[学科分类] 电子与电气工程