Erbium hydride thermal desorption : controlling kinetics.

[摘要] Thermal desorption spectroscopy (TDS) is used to study the decomposition kinetics of erbium hydride thin films. The TDS results presented in this report show that hydride film processing parameters directly impact thermal stability. Issues to be addressed include desorption kinetics for dihydrides and trihydrides, and the effect of film growth parameters, loading parameters, and substrate selection on desorption kinetics.

[发布日期] 2007-08-01

[学科分类] 化学（综合）

[关键词] DESORPTION;ERBIUM HYDRIDES;KINETICS;SPECTROSCOPY;STABILITY;SUBSTRATES;THIN FILMS;DECOMPOSITION Electron-stimulated desorption.;Thin films-Materials.;Erbium tritides.;Thin films-Analysis.