The Sandia MEMS Passive Shock Sensor : FY08 testing for functionality, model validation, and technology readiness.

[摘要] This report summarizes the functional, model validation, and technology readiness testing of the Sandia MEMS Passive Shock Sensor in FY08. Functional testing of a large number of revision 4 parts showed robust and consistent performance. Model validation testing helped tune the models to match data well and identified several areas for future investigation related to high frequency sensitivity and thermal effects. Finally, technology readiness testing demonstrated the integrated elements of the sensor under realistic environments.

[发布日期] 2008-10-01

[学科分类] 工程和技术（综合）

[关键词] SENSORS;PERFORMANCE TESTING;SENSITIVITY;TEMPERATURE DEPENDENCE;VALIDATION;SHOCK WAVES;MATHEMATICAL MODELS;MICROELECTRONICS Microelectromechanical systems-Materials;Shock tests.;Sensors.