The Sandia MEMS passive shock sensor : FY08 design summary.

[摘要] This report summarizes design and modeling activities for the MEMS passive shock sensor. It provides a description of past design revisions, including the purposes and major differences between design revisions but with a focus on Revisions 4 through 7 and the work performed in fiscal year 2008 (FY08). This report is a reference for comparing different designs; it summarizes design parameters and analysis results, and identifies test structures. It also highlights some of the changes and or additions to models previously documented [Mitchell et al. 2006, Mitchell et al. 2008] such as the way uncertainty thresholds are analyzed and reported. It also includes dynamic simulation results used to investigate how positioning of hard stops may reduce vibration sensitivity.

[发布日期] 2008-11-01

[学科分类] 工程和技术（综合）

[关键词] SENSORS;DESIGN;MATHEMATICAL MODELS;SHOCK WAVES;MONITORING;MICROELECTRONICS;SENSITIVITY Microelectromechanical systems-Design and construction.;Shock waves-Measurement.