Large Optic Drying Station: Summary of Dryer Certification Tests

[摘要] The purpose of this document is to outline the methodology used to baseline and maintain the cleanliness status of the newly built and installed Large Optic Cleaning Station (LOCS). The station has currently been in use for eleven months; and after many cleaning studies and implementation of resulting improvements appears to be cleaning optics to a level that is acceptable for the fabrication of Nano-Laminates.

[发布日期] 2009-08-28

[学科分类] 物理（综合）

[关键词] CLEANING;DRYING;FABRICATION;IMPLEMENTATION;OPTICS