Materials Science Clean Room Facility at Tulane University (Final Technical Report)

[摘要] The project involves conversion of a 3,000 sq. ft. area into a clean room facility for materials science research. It will be accomplished in phases. Phase I will involve preparation of the existing space, acquisition and installation of clean room equipped with a pulsed laser deposition (PLD) processing system, and conversion of ancillary space to facilitate the interface with the clean room. From a capital perspective, Phases II and III will involve the acquisition of additional processing, fabrication, and characterization equipment and capabilities.

[发布日期] 2010-09-30

[学科分类] 材料科学（综合）

[关键词] Clean Room