A NOVEL LOW THERMAL BUDGET THIN-FILM POLYSILICON FABRICATION PROCESS FOR LARGE-AREA, HIGH-THROUGHPUT SOLAR CELL PRODUCTION

[摘要] A novel thin-film poly-Si fabrication process has been demonstrated. This low thermal budget process transforms the single- and multi-layer amorphous silicon thin films into a poly-Si structure in one simple step over a pulsed rapid thermal annealing process with the enhancement of an ultrathin Ni layer. The complete poly-Si solar cell was fabricated in a short period of time without deteriorating the underneath glass substrate. The unique vertical crystallization process including the mechanism is discussed. Influences of the dopant type and process parameters on crystal structure will be revealed. The poly-Si film structure has been proved using TEM, XRD, Raman, and XPS methods. The poly-Si solar cell structure and the performance have been examined. In principle, the new process is potentially applicable to produce large-area thin-film poly-Si solar cells at a high throughput and low cost. A critical issue in this process is to prevent the excessive dopant diffusion during crystallization. Process parameters and the cell structure have to be optimized to achieve the production goal.

[发布日期] 2010-08-15

[学科分类] 再生能源与代替技术

[关键词] ANNEALING;CRYSTAL STRUCTURE;CRYSTALLIZATION;DIFFUSION;FABRICATION;GLASS;PERFORMANCE;PRODUCTION;SILICON;SOLAR CELLS;THIN FILMS;X-RAY DIFFRACTION;X-RAY PHOTOELECTRON SPECTROSCOPY thin film;solar cells;polysilicon thin film sol