Collective behaviors of the Casimir force in microelectromechanical systems

[摘要] Our goal was to explore the strong dependence of the Casimir force on the shape of the interacting bodies. We made significant progress and measured the Casimir force on silicon surface with rectangular corrugation and showed that the results agree with theoretical calculations, provided that the optical properties of silicon are taken into account. Furthermore, we performed measurement of the Casimir force within a single chip for the first time, between a doubly clamped beam and a movable, on-chip electrode at liquid helium temperature. This experiment represents a new way of studying the Casimir effect, a significant advance from the conventional approach of placing an external surface close to a force transducer.

[发布日期] 2013-01-23

[学科分类] 物理（综合）