Rapid Evaluation of Particle Properties using Inverse SEM Simulations

[摘要] This report is the final deliverable of a 3 year project whose purpose was to investigate the possibility of using simulations of X-ray spectra generated inside a scanning electron microscope (SEM) as a means to perform quantitative analysis of the sample imaged in the SEM via an inverse analysis methodology. Using the nine point Technology Readiness Levels (TRL) typically used by the US Department of Defense (DOD) and the National Aeronautics and Space Administration (NASA), this concept is now at a TRL of 3. In other words, this work has proven the feasibility of this concept and is ready to be further investigated to address some of the issues highlighted by this initial proof of concept.

[发布日期] 2016-01-01

[学科分类] 化学（综合）

[关键词] SCANNING ELECTRON MICROSCOPY;SIMULATION;X-RAY SPECTRA;EVALUATION;IMAGES;FEASIBILITY STUDIES;QUANTITATIVE CHEMICAL ANALYSIS