Ultrahigh vacuum holder-positioner for in situ studies of conductive nanostructures in a wide temperature range

[摘要] A holder-positioner was developed in order to be used in high vacuum systems designed for synthesis and in situ samples investigation by optical methods in 77±1171 K temperature range. During tests of holder- positioner the designed system demonstrated independence from other process chamber components, compactness, a large number of the sample degrees of freedom and the stability of maintaining temperatures in the range from 77 to 1171 K with a maximum sample cooling rate about 0.1 K/s.

[发布机构] Reshetnev Siberian State Aerospace University, Krasnoyarsk; 660037, Russia^1;Kirensky Institute of Physics, Federal Research Center KSC SB RAS, Krasnoyarsk; 660036, Russia^2

[学科分类] 航空航天科学

[关键词] Conductive nanostructure;High vacuum systems;Maintaining temperatures;Optical methods;Process chambers;Sample cooling;Temperature range;Wide temperature ranges