Checkerboard deposition of lithium manganese oxide spinel (LiMn2O4) by RF magnetron sputtering on a stainless steel in all-solid-state thin film battery

[摘要] All-solid-state thin film lithium batteries (TFLBs) are the most competitive low-power sources to be applied in various kinds of micro-electro-mechanical systems and have been draw a lot of attention in academic research. In this paper, the checkerboard deposition of all-solid-state TFLB was composed of thin film lithium metal anode, lithium phosphorus oxynitride (LiPON) solid electrolyte, and checkerboard deposition of lithium manganese oxide spinel (LiMn2O4) cathode. The LiPON and LiMn2O4were deposited by a radio frequency magnetron sputtering system, and the lithium metal was deposited by a thermal evaporation coater. The electrochemical characterization of this lithium battery showed the first discharge capacity of 107.8 μAh and the capacity retention was achieved 95.5% after 150 charge-discharge cycles between 4.3V and 3V at a current density of 11 μA/cm2(0.5C). Obviously, the checkerboard of thin film increased the charge exchange rate; also this lithium battery exhibited high C-rate performance, with better capacity retention of 82% at 220 μA/cm2(10C).

[发布机构] Physics Division, Institute of Nuclear Energy Research (INER), Longtan District, Taoyuan City, Taiwan^1;Institute of Organic and Polymeric Materials, National Taipei University of Technology, Taipei, Taiwan^2

[效力级别] 材料科学

[关键词] Charge-discharge cycle;Electrochemical characterizations;First discharge capacities;Lithium manganese oxide spinels;Lithium phosphorus oxynitride;Micro electro mechanical system;Radio-frequency magnetron sputtering system;rf-Magnetron sputtering