An Improved Model for Air Damping of Perforated Structures

[摘要] the prediction of air damping of micromachined mechanical resonant structures is significant in the design of high quality factor devices. In rarefied air, based on Bao's molecule model, Li gives an analytical model for air damping of perforated structures. By studying the action of molecules going through holes and reflected by the fixed plate, this paper gives a probability of molecules through holes going into the gap between the moving plate and the fixed one. Comparison with Li's model, the new model can play a better performance of air damping for perforated structures, at a wide range of size of holes.

[发布机构] School of Mechanical Engineering, Southeast University, China^1

[效力级别] 无线电电子学

[关键词] Air damping;High quality factors;Micro-machined;Molecule modeling;Moving plate;Perforated structure;Resonant structures;Through hole