Effect of the temperature variation on the hardness and microstructure of TiSiNO coatings obtained by sputtering

[摘要] Titanium-Silicon Oxynitride (TiSiNO) coatings were synthetized by reactive co-sputtering technique on stainless steel 304 substrates varying the substrate temperature during the deposition. Two targets were used simultaneously, the first one of Ti on a DC source at 100 W and the second was a Ti-Si-O target on a pulsing RF source at 180 W. X-ray diffraction identified three crystalline phases: titanium nitride (TiN), titanium oxide (TiO) and silicon oxide (SiO2), where the SiO2 phase presented compressive stresses at low temperatures and tension stresses at higher temperatures, along with a change in the preferential orientation. The coating obtained at 200 C showed the higher hardness value of 14.8 GPa, attributed to a lower grain size and high compressive stress. Finally, all coatings presented high fracture toughness, since the was a lack of any type of crack for all applied load values.

[发布机构] Centro de Investigación en Micro y Nanotecnologia, Universidad Veracruzana, Boca del Rio, Veracruz; 94294, Mexico^1;Facultad de Ingenieria, Universidad Veracruzana, Boca del Rio, Veracruz; 94294, Mexico^2;Facultad de Ingenieria en Tecnologia de la Madera, Universidad Michoacana de San Nicolás de Hidalgo, Michoacán, Morelia; 58030, Mexico^3;Posgrado de Ingenieria Quimica, Universidad Michoacana de San Nicolás de Hidalgo, Michoacán, Morelia; 58000, Mexico^4

[效力级别] 材料科学 [学科分类] 材料科学（综合）

[关键词] Crystalline phasis;Preferential orientation;Reactive co-sputtering;Silicon oxynitrides;Stainless steel-304;Substrate temperature;Temperature variation;Titanium oxide (TiO)