Finishing technologies for processing of optical microelectronic items

[摘要] This article discusses comparative studies of the influence of specific pressure and speed of relative motion of tool and item on polishing capacity and quality of processed surface of lithium niobate single crystal. The equation for calculation of total depth of layer destroyed upon finishing and time of polishing required for its removal. Analysis of polishing tool has accounted for strength properties of the polishing material, removal capacity, and quality of processed surface of lithium niobate single crystal. It is experimentally established that upon basic pressure both for woven and unwoven polishers with the highest capacity the lower limit of grain coarseness of polishing suspension is 1/0.5 μm. A reserve of increase in shape accuracy and polishing quality is the use of polishers with equal thickness and structure of working surface.

[发布机构] Perm National Research Polytechnic University, Komsomolsky prospekt 29, Perm, Perm krai; 614990, Russia^1;National Research Nuclear University, MEPhI (Moscow Engineering Physics Institute), Kashirskoe shosse 31, Moscow; 115409, Russia^2

[关键词] Comparative studies;Finishing technology;Lithium niobate single crystals;Polishing tool;Relative motion;Removal capacity;Specific pressure;Strength property