Miniaturized ceramic platform for metal oxide gas sensors array

[摘要] In work is developing an ultra-fast, low cost and technology flexible process for production array of ceramic MEMS microhotplates for using in semiconductor gas sensors orientated to small series applications, where is sufficient to produce 10-100 samples with a different layout of heaters and membrane per day.

[发布机构] National Research Nuclear University, MEPhI (Moscow Engineering Physics Institute), Kashirskoe shosse 31, Moscow; 115409, Russia^1

[关键词] Flexible process;Low costs;Metal oxide gas sensors;Microhotplates;Semiconductor gas sensors;Ultra-fast