Equivalent circuit of a coaxial-line-based nozzleless microwave 915 MHz plasma source

[摘要] This paper presents a new concept of an equivalent circuit of a microwave plasma source (MPS) used for gas treatment. The novelty of presented investigations is the use of the Weissfloch circuit as equivalent of an area of waveguide discontinuity in the MPS which is a result of entering a coaxial-line structure. Furthermore, in this area the microwave discharge is generated. Verification of the proposed method was carried out. The proposed equivalent circuit enabled calculating the MPS tuning characteristics and comparing them with those measured experimentally. This process allowed us to determine the impedance ZPofplasma in the MPS.

[发布机构] Centre for Plasma and Laser Engineering, Szewalski Institute of Fluid-Flow Machinery, Polish Academy of Sciences, ul. Fiszera 14, Gdask; 80-231, Poland^1;Department of Marine Electronics, Gdynia Maritime University, ul. Morska 81-87, Gdynia; 81-225, Poland^2

[关键词] 915 mhz;Coaxial line;Gas treatment;Microwave discharge;Microwave plasma sources