Calculating the geometric parameters of the distribution of electron beam energy density on its section in EBW

[摘要] The article considers various ways of calculating the diameter of an electron beam. Analysis of the energy density distribution curves in the cross section of the electron beam shows that they differ from the normal law. In view of this, a method is proposed for calculating the width of the distribution of energy density in the cross section of an electron beam, considering the shape of the distribution curve. The method is based on calculating the entropy of the distribution. The method of calculating the width of the distribution according to the probe characteristics is considered.

[发布机构] Reshetnev Siberian State University of Science and Technology, Krasnoyarsky Rabochy Av., Krasnoyarsk 31; 660037, Russia^1

[效力级别] 工业技术

[关键词] Distribution curves;Electron beam energy;Energy density;Energy density distributions;Normal law;Probe characteristics