Analyzers of charged particles flows with different functional capabilities

[摘要] Parameters of instruments developed on the basis of previously calculated different electron-optical systems for the analysis of charged particle flows were considered in the present work. Recommendations for their application in various fields of electron spectroscopy for the analysis of a solid surface were given.

[发布机构] Lomonosov Moscow State University, Kazakhstan Branch, Kazhimukan str.11, Astana; 010010, Kazakhstan^1;Ye.A. Buketov Karaganda State University, Universitetskaya str. 28, Karaganda; 100028, Kazakhstan^2

[效力级别] 物理学 [学科分类] 材料科学（综合）

[关键词] Charged particle flow;Electron optical system;Functional capabilities;Solid surface