Design and Modelling of a Silicon Optical MEMS Switch Controlled by Magnetic Field Generated by a Plain Coil

[摘要] Optical switches can be made as a silicon cantilever with a magnetic layer. Such a structure is placed in a magnetic field of a planar coil. There is a torque deflecting the silicon beam with NiFe layer depending on a flux density of the magnetic field. The study shows an analysis of ferromagnetic layer parameters, beam's dimensions on optical switch characteristics. Different constructions of the beams were simulated for a range of values of magnetic field strength from 100 to 1000 A/m. An influence of the actuators parameters on characteristics was analysed. The loss of stiffness of the beam caused by specific constructions effected in displacements reaching 85 nm. Comsol Multiphysics 4.3b was used for the simulations.

[发布机构] Lodz University of Technology, Department of Semiconductor and Optoelectronics Devices, 211/215 Wolczanska, 90-924 Lodz, Poland^1;Lodz University of Technology, Faculty of Electrical, Electronic, Computer and Control Engineering, 211/215 Wolczanska, 90-924 Lodz, Poland^2

[效力级别] 无线电电子学

[关键词] Comsol multiphysics;Ferromagnetic layers;Flux densities;Magnetic field strengths;Magnetic layers;Optical MEMS switch;Silicon beams;Silicon cantilever