Optical Fibre Angle Sensor Used in MEMS
[摘要] There is a need for displacement and angle measurements in many movable MEMS structures. The use of fibre optical sensors helps to measure micrometre displacements and small rotation angles. Advantages of this type of transducers are their simple design, high precision of processing, low costs and ability of a non-contact measurement. The study shows an analysis of a fibre-optic intensity sensor used for MEMS movable structure rotation angle measurement. An intensity of the light in the photodetector is basically dependent on a distance between a reflecting surface and a head surface of the fibre transmitting arm, and the deflection angle. Experimental tests were made for PMMA 980/1000 plastic fibres, ΘNA=33°. The study shows both analytical and practical results. It proves that calculated and experimental characteristics for the analysed transducers are similar.
[发布日期] [发布机构] Lodz University of Technology, Department of Semiconductor and Optoelectronic Devices, 211/215 Wolczanska, 90-924 Lodz, Poland^1;Lodz University of Technology, Faculty of Electrical, Electronic, Computer and Control Engineering, 211/215 Wolczanska, 90-924 Lodz, Poland^2
[效力级别] 无线电电子学 [学科分类]
[关键词] Deflection angles;Experimental characteristics;Experimental test;Fibre-optical sensors;Movable structure;Noncontact measurements;Reflecting surface;Rotation angle measurement [时效性]
