Semiconductor and Ceramic Microstructure Made by Single Mode Fiber Laser

[摘要] In the paper the results of micromachining of 3D microstructures of microsystems made from silicon and alumina ceramic using a single mode fiber laser (1064 nm) are presented. The quality of obtained structures and its smallest dimensions with acceptable maintained quality were examined. The influence of variable parameters of laser processing with changing of mapping scale on geometrical features of structures was identified.

[发布机构] Lodz University of Technology, Institute of Electrical Engineering Systems, Stefanowskiego 18/22, 90-924 Lodz, Poland^1;Lodz University of Technology, Department of Chemical Engineering, Wolczanska 213, 90-924 Lodz, Poland^2

[效力级别] 无线电电子学

[关键词] 1064 nm;3D microstructures;Alumina ceramic;Ceramic microstructures;Geometrical features;Laser process;Variable parameters