Thick Film Heater for Sensor Application

[摘要] A thick film microheater was elaborated. The microheater is intended for fast heating of small volume samples under measurement in optical based system. Thermal analysis of microheater was carried out using finite element method (FEM) for heat transfer calculation as a function of time and space. A nodal heat transfer function was calculated in classical form including all basics mechanisms of heat exchange-heat conduction, convection and radiation were considered. Work focuses on the influence of some construction parameters (ex. length, thermal conductivity of substrate, substrate thickness) on microheater performance. The results show that application of thin substrate of low thermal conductivity and low thickness for miroheater construction and resistor of optimum dimensions leads to significant power consumption decrease and increase of overall optical measurement system performance.

[发布机构] Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-655 Warsaw, Poland^1;Tele- and Radio Research Institute, Ratuszowa 11, 03-450 Warsaw, Poland^2

[效力级别] 无线电电子学

[关键词] Construction parameter;Function of time;Heat transfer calculations;Low thermal conductivity;Optical measurement systems;Optimum dimensions;Sensor applications;Substrate thickness