Monte Carlo Method Applied to the ABV Model of an Interconnect Alloy

[摘要] A Monte Carlo (MC) simulation of a 2D microscopic ABV (metal A, metal B and void V) Ising model of an interconnect alloy is performed by taking into account results of Finite Element methods (FEM) calculations on correlated void-thermal effects. The evolution of a homogeneous structure of a binary alloy containing a small percentage of voids is studied with temperature cycling. The diffusion of voids and segregation of A type or B type metals is a function of the relative interaction energy of the different pairs AA, BB, AB, AV and BV, the initial concentrations of A, B and V and local heating effect due to the presence of clusters of voids. Voids segregates in a matrix of A type, of B type or AB type and form large localized clusters or smaller delocalized ones of different shapes.

[发布机构] LATMOS/IPSL, UVSQ Université Paris-Saclay, UPMC Univ. Paris 06, CNRS, Guyancourt; F-78280, France^1;CHAIR Materials Simulation and Engineering, UVSQ, Université Paris Saclay, Versailles Cedex; 78035, France^2;GEMaC, CNRS-UMR 8635, Université de Versailles St. Quentin en Yvelines, Versailles; 78035, France^3;LISV, Université de Versailles St. Quentin en Yvelines, Versailles; 78035, France^4;VALEO, BP 68532 Cergy, Cergy Pontoise Cedex; 95892, France^5;INSTN-CEA-Saclay, Gif-sur-Yvette Cedex; 91191, France^6;INSA de ROUEN Laboratoire de Mécanique, Pôle Technologique du Madrillet, BP 8, Saint Etienne du Rouvray; 76801, France^7

[效力级别] 数学

[关键词] Different shapes;Homogeneous structure;Initial concentration;Interaction energies;Local heating;Temperature cycling