A computing model of ion energy distributions for dual frequencies capacitive couple discharges
[摘要] We have developed an analytical dual-frequency model, which results in accurate dual-peaks of the ion energy distributions (IEDs) for the given control parameters. The model can analytically calculate and predict the IEDs dual peaks and energy width with necessary plasma parameters. This model can also predict the IEDs from dual frequencies' drives at any voltage, the associated results are compared with particle-in-cell (PIC) simulations. The IED at a surface is an important parameter for processing in dual radio frequencies driven capacitive couple discharges. The computing model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time- varying ion energy response at the surface. This model is in good agreement with PIC simulations over a wide range of dual frequencies driven capacitive couple discharge excitations.
[发布日期] [发布机构] Physics and Electronic Science College, Guizhou Education University, Guiyang; 550018, China^1;Key Laboratory of Photoelectron Materials Design and Simulation in Guizhou Province, Guiyang; 550018, China^2;Scientific Research Innovation Team in Plasma and Functional Thin Film Materials in Guizhou Province, Guiyang; 550018, China^3
[效力级别] 数学 [学科分类]
[关键词] Capacitive couples;Control parameters;Ion energy distributions;Linear transfer function;Low pressure discharge;Particle-in-cell simulations;Plasma parameter;Radio frequencies [时效性]
