Oxide/ metal/oxide nanolaminate structures for application of transparent electrodes

[摘要] Transparent and conductive oxide/ metal/ oxide nanolaminate structures were deposited on glass and polymer substrate by RF magnetron sputtering without substrate heating. The Ag nanoparticles with different size and distance between neighboring particles were located on the interface of two thin oxide layers. This sputtering configuration allows obtaining thin films with homogeneous thickness. The three targets give the opportunity to deposit successively three different layers without opening the chamber. The developed process for transparent conducting coating is a low temperature and it is suitable for application on organic materials as substrate and foils. The experiment with different substrates manifest that the optical transparency of the conducting coating depends on substrate material. The obtained results have demonstrated that the nanolaminate structures oxide/metal/oxide (OMO) as TCO coating are especially suitable for applications in flexible electronics and optoelectronics.

[发布机构] Central Laboratory of Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, Blvd. Tzarigradsko chaussee 7, Sofia; 1784, Bulgaria^1

[效力级别] 材料科学 [学科分类] 材料科学（综合）

[关键词] Conducting coating;Different substrates;Nanolaminate structures;Optical transparency;rf-Magnetron sputtering;Substrate heating;Substrate material;Transparent conducting coating