An investigation of lead zirconate titanate thick film actuators for Micro-structured Optical Arrays

[摘要] Micro-structured optical arrays (MOAs) are micro channels etched in silicon substrates and can be used as mirrors to reflect and focus X-rays. Piezoelectric PZT (lead zirconate titanate) thick films deposited on silicon substrates can be used to bend the micro channels to vary the focal length of the MOAs. Thick-film PZT is more robust and easier to pattern than bulk PZT so it is chosen to provide actuation for the MOAs. In this project the manufacturing processes of thick-film PZT on silicon substrates are investigated, including ball-milling of starting powders, paste composition, paste preparation, doctor blading method, sintering regime, and poling. The particle size and surface area of the starting powders were measured to see the effect of wet ball-milling. Active thick-film PZT samples on silicon substrates have been successfully made. The thick-film samples were characterised using d33 measurement, impedance analysis, SEM, and XRD techniques. An average d33 of 76 pC/N has been achieved. A feasible method to manufacture thick-film PZT on silicon substrates has been summarised.Keywords: PZT, thick-film, silicon substrate, doctor blading, piezoelectric material, ball milling, micro-structured optical arrays.

[发布机构] University:University of Birmingham;Department:School of Metallurgy and Materials

[关键词] Q Science;Q Science (General)