Effect of composition on properties of In2O3_Ga2O3 thin films

[摘要] The In2O3-Ga2O3mixed oxide polycrystalline thin films with various ratios of components were obtained by pulsed laser deposition. The effect of films composition on surface morphology, electrophysical and gas sensing properties and energies of adsorption and desorption of combustible gases was studied. The films with50%In2O3-50%Ga2O3composition showed maximum gas response (∼25 times) combined with minimum optimal working temperature (∼530 °C) as compared with the other films. The optical transmittance of the films in visible range was investigated. For 50%In2O3-50%Ga2O3films, the transmittance is higher in comparison with the other films. The explanation of the dependency of films behaviors on their composition was presented.The In2O3-Ga2O3films were assumed to have perspectives as gas sensing material for semiconducting gas sensors.

[发布机构] Omsk State Technical University, Mira Ave., 11, Omsk; 644050, Russia^1

[效力级别] 物理学 [学科分类] 力学，机械学

[关键词] Adsorption and desorptions;Combustible gas;Gas response;Gas sensing material;Gas sensing properties;Polycrystalline thin film;Visible range;Working temperatures