Collision-Free Structure Using Thin-Film Magnet For Electrostatic Energy Harvester

[摘要] This paper proposes collision-free structure using NdFeB thin-film magnet for vibration energy harvesters. By using stripe shaped NdFeB magnet array on the Si MEMS structure, we finally obtained 3 mN of magnetic repulsive force on 8 × 8 mm2specimen with 40 μm air-gap.

[发布机构] Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo; 671-2280, Japan^1

[效力级别] 能源学

[关键词] Collision-free;Electrostatic energies;MEMS-structure;Nd-Fe-B magnets;Nd-Fe-B thin films;Repulsive forces;Thin film magnets;Vibration energy harvesters