Multi-Axis Inertial Energy Harvester Based on Piezoelectric Crab-Legs with Partitioned Electrodes
[摘要] This paper reports a microfabricated piezoelectric MEMS inertial energy harvester that can scavenge high-frequency mechanical vibrations in all three dimensions with an active inner volume of only 55 mm3. The device can generate 0.1 to 10.5 μW from out-of-plane vibrations (365-465 Hz), and 0.1 to 3.2 μW from in-plane vibrations (680-930 Hz) at 0.5 g acceleration input. The reported harvester is demonstrated to be effective for multi-axis operation, with a favorable power density of 0.2-2.2 mW/cm3/g2(at 0.1-0.5 g) with respect to previously reported microfabricated multi-axis vibration harvesters.
[发布日期] [发布机构] Center for Wireless Integrated MicroSensing and Systems (WIMS2), EECS Department, University of Michigan, Ann Arbor; MI; 48104, United States^1
[效力级别] 能源学 [学科分类]
[关键词] High frequency HF;In-plane vibration;Inertial energy;Multi-axis vibrations;Out-of-plane vibrations;Piezoelectric MEMS;Power densities;Three dimensions [时效性]
