MEMS ion-sorption high vacuum pump

[摘要] In the article a miniature MEMS-type ion-sorption vacuum pump has been presented. The influence of electric and magnetic field, as well as horizontal and vertical dimensions of the micropump and type of material used for electrodes on the pump properties has been investigated. It has been found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and pumping cell is larger than 1x1x1 mm3. The pump allows generating vacuum at the level of 10-7-10-9hPa in 100 mm3volume.

[发布机构] Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, 11/17 Janiszewskiego Str., Wroclaw; 50-372, Poland^1

[效力级别] 能源学

[关键词] Electric and magnetic fields;High vacuum;Ion sorption;Micro pump;Pumping cells;Vertical dimensions