Nitride Nanowires: From Rigid to Flexible Piezo-generators

[摘要] Here we employ self-assembled Mg-doped GaN nanowires (NWs) grown by plasma assisted molecular beam epitaxy on Si(111) substrates to fabricate piezogenerators. We first discuss the fabrication and testing of rigid nanowire-based generators and then a flexible generator prototype is shown.

[发布机构] Centre de Nanosciences et de Nanotechnologies - Site Orsay, Université Paris Saclay, Centre Scientifique d'Orsay, Orsay; F-91405, France^1;Centre de Nanosciences et de Nanotechnologies - Site Marcoussis, Université Paris- Saclay, Route de Nozay, Marcoussis; F-91460, France^2;GeePs, UMR 8507 CNRS-Centrale Supélec, Paris-Sud et UPMC Université, Gif-sur-Yvette; 91192, France^3

[效力级别] 能源学

[关键词] GaN nanowires;Mg-doping;Plasma assisted molecular beam epitaxy;Si(111) substrate