Combinatorial approach to MgHf co-doped AlN thin films for Vibrational Energy Harvesters

[摘要] In this report, we studied MgHf co-doped AlN ((Mg,Hf)xA11-xN) aiming for developing an AlN-based dielectric material with the large piezoelectric coefficient. To rapidly screen the wide range of composition, we applied combinatorial film growth approach. To get continuous composition gradient on a single substrate, films were deposited on Si (100) substrates by sputtering AlN and Mg-Hf targets simultaneously. Crystal structure was investigated by X-ray diffractometer equipped with a two-dimensional detector (2D-XRD). Composition was determined by Energy Dispersive Spectroscopy (EDS). These studies revealed that we successfully covered the widest ever composition range of 0

[发布机构] Department of Robotics, Tohoku University, Sendai, Japan^1;AIMR, Tohoku University, Sendai, Japan^2

[效力级别] 能源学

[关键词] Combinatorial approach;Composition gradient;Energy dispersive spectroscopies (EDS);Piezoelectric coefficient;Si (100) substrate;Two-dimensional detectors;Vibrational energies;X ray diffractometers