Fatigue of micromachined stainless steel structural materials for vibrational energy harvesting

[摘要] This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107cycles.

[发布机构] Graduate School of Engineering, Tohoku University, Sendai, Japan^1

[效力级别] 能源学

[关键词] Bending modes;Cantilever structures;Endurance limit;Fatigue measurements;Micro-machined;Proof mass;Vibrational energy harvesting