Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams

[摘要] During the manufacturing of MEMS components, slanted beams can be produced in the etching process. We show that this can be used to produce skew motion that causes deflection of a proof mass out of the device plane also when the excitation is confined to the device plane. This allows construction of an energy harvester that uses a planar manufacturing process and produces power also with in-plane excitation. To obtain this with traditional methods it would be necessary to manufacture separate components and then mount them with their sensitive axes orthogonal to each other.

[发布机构] Acreo Swedish ICT AB, Arvid Hedvalls Backe 4, Gothenburg; SE-411 33, Sweden^1

[效力级别] 能源学

[关键词] Energy Harvester;Etching process;Manufacturing process;Multi-Axis;Piezoelectric energy harvesting;Proof mass;Slanted beams