MEMS ion source for mass spectrometer integrated on a chip
[摘要] The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.
[发布日期] [发布机构] Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, 11/17 Janiszewskiego Str., Wroclaw; 50-372, Poland^1
[效力级别] 能源学 [学科分类]
[关键词] Deposited carbon nanotubes;Electron-impact ion sources;Field emission electron sources;Ion-beam formation;Manufacturing process;MEMS technology;Miniature mass spectrometers;Test structure [时效性]
