Effect of packaging pressure on energy harvesting from vibration source

[摘要] In this paper, we have studied the effect of air pressure damping on the vibration- based energy harvesting devices. The device we used is an electrostatic energy harvester with an out-of-the-plane gap closing scheme. A broadened bandwidth is observed at 4 Pa when the acceleration is increased from 0.5 m/s2. A power output of 2.2 μW is achieved at the air pressure of 4 Pa when a low acceleration of 0.5 m/s2is applied, while the power output is only 0.02 μW at atmosphere with an acceleration of 1.2 m/s2. Detailed study is made to investigate the waveform of the displacement and the voltage output. Nonlinearity is observed at low air gas pressure about 239 Pa and it is more significant at 4 Pa.

[发布机构] Dept. Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen; 518055, China^1;Shenzhen Key Laboratory of 3rd Generation Semiconductor Devices, Shenzhen; 518055, China^2

[效力级别] 能源学

[关键词] Air pressures;Electrostatic energies;Energy harvesting from vibrations;Gap closing;Gas pressures;Power out put;Vibration-based energy harvesting;Voltage output