MEMS electrostatic influence machines

[摘要] This paper analyses the possibility of MEMS electrostatic influence machines using electromechanical switches like the historical predecessors did two centuries ago. We find that a generator design relying entirely on standard silicon-on-insulator(SOI) micromachining is conceivable and analyze its performance by simulations. The concept appears preferable over comparable diode circuits due to its higher maximum energy, faster charging and low precharging voltage. A full electromechanical lumped-model including parasitic capacitances of the switches is built to capture the dynamic of the generator. Simulation results show that the output voltage can be exponentially bootstrapped from a very low precharging voltage so that otherwise inadequately small voltage differences or charge imbalances can be made useful.

[发布机构] University College of Southeast Norway, Norway^1

[效力级别] 能源学

[关键词] Charge imbalance;Electromechanical switches;Generator design;Lumped modeling;Output voltages;Parasitic capacitance;Silicon on insulator (SOI);Voltage difference