Photoelectric-Charging-Enhanced MEMS Electret Energy Harvester with Vacuum Packaging

[摘要] A novel MEMS electret energy harvester charged with UV light after sealed in a vacuum package is proposed. By 265 nm UV irradiation, electrons are generated inside the package through the photoelectric effect. Uniform surface potential on sidewalls of the comb drives has been obtained. With a MEMS electret generator in a 60 Pa package, 2.28 μW has been obtained at 1 g and 740 Hz, which is 10 times higher than the output power at the atmospheric pressure.

[发布机构] Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo; 113-8656, Japan^1

[效力级别] 能源学

[关键词] Comb drive;Energy Harvester;Output power;UV irradiation;Vacuum package;Vacuum packaging