Optimization of power output in planar thermoelectric microgenerators based on Si nanowires

[摘要] This work reports the efforts to optimize the output power achieved with all-silicon thermoelectric microgenerators based on MEMS fabrication technology and silicon nanowires as active material. Recent improvements introduced in both the fabrication process and the device design are described, and a set of experimental results obtained with both device types (new vs. old design/process) are provided to assess the impact of the different modifications on thermal and electrical performance, as well as in the overall harvested power.

[发布机构] IMB-CNM, CSIC, Campus UAB, Barcelona, Bellaterra; 08193, Spain^1;Catalonia Institute for Energy Research (IREC), Barcelona; 08930, Spain^2

[效力级别] 能源学

[关键词] Active material;Device design;Electrical performance;Fabrication process;MEMS fabrication;Microgenerators;Power out put;Silicon nanowires