MEMS Rotational Electret Energy Harvester for Human Motion

[摘要] This paper reports the development of MEMS rotational electret energy harvester (EH) for capturing kinetic energy of human motion. Optimal design method of rotational electret EH is proposed by considering both the rate of overlapping-area-change and the parasitic capacitance. A rotational MEMS electret EH with embedded ball bearing has been successfully developed. Up to 3.6 μW has been obtained at 1 rps rotation with an early prototype.

[发布机构] Hokuriku Electric Industry Co. Ltd., 3158 Shimookubo, Toyama-shi, Toyama; 932- 2292, Japan^1;Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo; 113-8656, Japan^2

[效力级别] 能源学

[关键词] Energy Harvester;Human motions;Optimal design methods;Overlapping area;Parasitic capacitance