Low-Frequency MEMS Electrostatic Vibration Energy Harvester With Corona-Charged Vertical Electrets and Nonlinear Stoppers

[摘要] This paper reports for the first time a MEMS electrostatic vibration energy harvester (e-VEH) with corona-charged vertical electrets on its electrodes. The bandwidth of the 1-cm2device is extended in low and high frequencies by nonlinear elastic stoppers. With a bias voltage of 46 V (electret@21 V + DC external source@25 V) between the electrodes, the RMS power of the device reaches 0.89 μW at 33 Hz and 6.6 μW at 428 Hz. The -3dB frequency band including the hysteresis is 223∼432 Hz, the one excluding the hysteresis 88∼166 Hz. We also demonstrate the charging of a 47 μF capacitor used for powering a wireless and autonomous temperature sensor node with a data transmission beyond 10 m at 868 MHz.

[发布机构] Université Paris-Est, ESYCOM, ESIEE Paris, France^1;Now at University of Perugia, NIPS Laboratory, Department of Physics, Italy^2;CEA, Leti, Minatec Campus, Grenoble, France^3;UPMC-Sorbonne Universités, LIP6, CNRS, France^4

[效力级别] 能源学

[关键词] External sources;Low and high frequencies;Low-frequency;Nonlinear elastics;Vibration energy harvesters