Novel Fabrication Process for Micro Thermoelectric Generators (μTEGs)

[摘要] A cost effective bottom-up process for the fabrication of micro thermoelectric generators (μTEGs) was developed. It is based on a novel fabrication method involving a selectively sacrificial photoresist for the sequential galvanostatic electrodeposition of thermoelectric materials. The use of an industrial pick and placer (P&P) for dispensing the second photoresist allows for accurate and flexible μTEG designs. The process makes use of Ordyl® as a negative dry film photoresist template and sequential lamination steps for shaping all thermoelectric legs and contacts. All structures of the μTEG are generated in one photoresist multi-layer - this represents the most significant advantage of the process. The process uses a minimum of clean room processing for the preparation of pre-structured substrates for electrodeposition and therefore provides a cost-effective, highly flexible fabrication platform for research and development.

[发布机构] University of Freiburg, Department of Microsystems Engineering - IMTEK, Lab for Design of Microsystems, Georges-Köhler-Allee 102, Freiburg; 79110, Germany^1

[效力级别] 能源学

[关键词] Fabrication method;Fabrication platform;Fabrication process;Micro-thermoelectric generator;Negative dry film photo-resist;Research and development;Structured substrate;Thermo-Electric materials