MEMS based Nonlinear Monostable Electromagnetic Vibrational Energy Harvester for Wider Bandwidth

[摘要] This paper reports a wideband vibrational energy harvesting scheme using a MEMS based nonlinear electromagnetic transducer. The nonlinearity is incorporated in the proposed device through the stretching strain in addition to the bending of the fixed-guided configured beams of the designed structure. The thin spring structure is fabricated on Silicon-On-Insulator substrate with device layer thickness of 50 m. The MEMS spring structure is packaged and characterized with wire wound copper coil (NE1) and micro fabricated double layer copper coil (NE2) for comparison. Measurement results show that ∼80 Hz half power bandwidth is obtained for the fabricated devices with maximum load powers of 2.8 W (NE1) and 0.4 W (NE2) respectively at 0.5g which improves the 'power-bandwidth gain' to one of the highest among reported works.

[发布机构] Micropower Systems and Nanomagnetics Group, Micro-nano-systems Center, Tyndall National Institute, Lee Maltings, Dyke Parade, Cork, Ireland^1;School of Mathematical Science, University College Cork, Cork, Ireland^2

[效力级别] 能源学

[关键词] Copper coils;Device layers;Double layers;Electromagnetic transducer;Fabricated device;Silicon-on-insulator substrates;Vibrational energies;Vibrational energy harvesting