Fabrication and Characterization of Nano/Micro Textured Electret to Avoid Electrostatic Stiction and Enhance Its Surface Potential

[摘要] An SiO2electret with nano/micro scaled texture was developed to enhance generation power of our previously developed electrostatic vibration energy harvester. The texture on SiO2was formed by lithography and wet etching process. The width /pitch of the each texture is 0.2 μm/0.6 μm or 1.0 μm/2.0 μm, respectively. Both initial value and stability of surface potential of textured electret was better than that of control sample. It was also found that the smaller texture enhance these properties. On the other hand, the stiction force using textured electret was smaller than that using control electret.

[发布机构] Faculty of Engineering Science, Kansai University, 3-3-35 Yamate-cho, Suita, Osaka; 564-8685, Japan^1;ROHM Co., Ltd., 21 Saiin Mizosaki-cho, Ukyo-ku, Kyoto; 615-8585, Japan^2

[效力级别] 能源学

[关键词] Control samples;Fabrication and characterizations;SiO2 electret;Stability of surfaces;Stiction forces;Vibration energy harvesters