Microfabrication of hybrid fluid membrane for microengines

[摘要] This paper describes the microfabrication and dynamic characterization of thick membranes providing a technological solution for microengines. The studied membranes are called hybrid fluid-membrane (HFM) and consist of two thin membranes that encapsulate an incompressible fluid. This work details the microelectromechanical system (MEMS) scalable fabrication and characterization of HFMs. The membranes are composite structures based on Silicon spiral springs embedded in a polymer (RTV silicone). The anodic bonding of multiple stacks of Si/glass structures, the fluid filling and the sealing have been demonstrated. Various HFMs were successfully fabricated and their dynamic characterization demonstrates the agreement between experimental and theoretical results.

[发布机构] FEMTO--RFSTI, Besancon, Universite de Bourgogne Franche-Comte, France^1;Laboratoire SYMME, Universite Savoie Mont Blanc, Annecy, France^2

[效力级别] 能源学

[关键词] Anodic bonding;Dynamic characterization;Fabrication and characterizations;Incompressible fluid;Microelectromechanical system (MEMS);Multiple stacks;Technological solution;Thick membranes