Piezoelectric MEMS for energy harvesting

[摘要] Recently, piezoelectric MEMS have been intensively investigated to create new functional microdevices, and some of them have already been commercialized such as MEMS gyrosensors or miropumps of inkjet printer head. Piezoelectric energy harvesting is considered to be one of the promising future applications of piezoelectric MEMS. In this report, we introduce the deposition of the piezoelectric PZT thin films as well as lead-free KNN thin films. We fabricated piezoelectric energy harvesters of PZT and KNN thin films deposited on stainless steel cantilevers and compared their power generation performance.

[发布机构] Kobe University, 1-1 Rokkodai-cho, Nada-ku, Kobe; 659-8501, Japan^1

[效力级别] 能源学

[关键词] Future applications;Gyro sensors;Lead-Free;Microdevices;Piezoelectric energy harvesters;Piezoelectric energy harvesting;Piezoelectric MEMS;Piezoelectric pzt thin films