Piezoelectric cellular micro-structured PDMS material for micro-sensors and energy harvesting

[摘要] This paper reports a novel low-cost fabrication process of a charged cellular microstructured polydimethylsiloxane (PDMS) material referred as piezo-electret or ferro-electret for micro-sensors applications. The dielectric spectra reached on these structures exhibit a high piezoelectric longitudinal coefficient d33of 350pC/N. A mechanical characterization method proves the reliability of this material for low-frequencies applications around 100Hz.

[发布机构] Univ. Grenoble Alpes, TIMA Laboratory, Grenoble; F-38031, France^1;CNRS, TIMA Laboratory, Grenoble; F-38031, France^2;Université de Tunis El Manar, Faculté des Sciences de Tunis, Laboratoire Matériaux, Organisation et Propriétés (LMOP), Tunis; 2092, Tunisia^3

[效力级别] 能源学

[关键词] Dielectric spectra;Low cost fabrication;Mechanical characterizations;Polydimethylsiloxane PDMS